ZEISS | Axio Imager Vario - Upright Microscope for Large Samples
The ZEISS Axio Imager Vario is perfect for analyzing large samples and MEMS sensors. Its innovative column design allows for stable examination of extremely large samples. It is certified for use in cleanrooms, making it especially suitable for wafer and photomask inspection.
Examine Large Samples: Choose between a manual or motorized column for samples up to 300 × 300 mm and 254 mm in height. The robust column structure ensures stability without vibrations, even when using heavy samples or confocal laser scanning microscopes like the ZEISS LSM.
Cleanroom Certification: The Axio Imager Vario meets the strict requirements of ISO Class 5 cleanrooms, making it ideal for inspection in environments that demand high cleanliness standards.
Precise Focus: With the hardware auto focus system, even reflective surfaces with low contrast can be examined precisely. The system provides exact focusing in both brightfield and darkfield illumination, automatically compensating for any deviations.
Hardware Auto Focus: The Axio Imager Vario ensures precise focusing in materials research and industrial manufacturing. The autofocus can be used for a variety of applications, including brightfield, darkfield, polarization contrast, and more, with a focus range up to 12,000 µm.
